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EE C247B/ME C218: Introduction to MEMS Design

EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen. Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.

Introduction


Lecture 01 - Admin & Course Overview
Lecture 02 - Benefits of Scaling I: GHz Micromechanical Resonators
Lecture 03 - Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits
Lecture 04 - Benefits of Scaling III: Thermal Circuits (cont.)
Lecture 05 - Benefits of Scaling III (cont.), Fabrication Process Modules
Lecture 06 - Fabrication Process Modules, Surface Micromachining
Lecture 07 - Surface Micromachining (cont.)
Lecture 08 - Surface Micromachining (cont.), Bulk Micromachining
Lecture 09 - Bulk Micromachining (cont.), Mechanics of Materials for MEMS I
Lecture 10 - Mechanics of Materials for MEMS II, Beam Bending
Lecture 11 - Beam Bending (cont.)
Lecture 12 - Beam Combos (cont.)
Lecture 13 - Beam Combos (cont.), Energy Methods
Lecture 14 - Resonance Frequency
Lecture 15 - Resonance Frequency (cont.), Equivalent Circuits
Lecture 16 - Equivalent Circuits (cont.), Capacitive Transducers
Lecture 17 - Capacitive Transducers (cont.)
Lecture 18 - Capacitive Transducers (cont.)
Lecture 19 - Equivalent Circuits II
Lecture 22 - Sensing Non-Idealities and Integration
Lecture 24 - Equivalent Input-Referred Noise & MDS (Minimum Detectable Signal)
Lecture 25 - Gyro Noise and MDS (Minimum Detectable Signal)

References
EE C247B/ME C218: Introduction to MEMS Design, Spring 2015
Instructors: Professor Clark Tu-Cuong Nguyen. Lecture Notes. Course Information. Homework. Admin & Overview. Benefits of Scaling. Fabrication Process Modules. ...