EE C247B/ME C218: Introduction to MEMS Design
EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen. Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.
| Lecture 11 - Beam Bending (cont.) |
| Time | Lecture Chapters |
| [00:00:00] | 1. Bending a Cantilever Beam (cont.) |
| [00:15:25] | 2. Cantilever Beam with a Concentrated Load |
| [00:42:20] | 3. Stress Gradients in Cantilevers |
| [01:15:40] | 4. Folded-Flexure Suspensions |
Go to the Course Home or watch other lectures: