EE C247B/ME C218: Introduction to MEMS Design
EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen. Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.
| Lecture 15 - Resonance Frequency (cont.), Equivalent Circuits |
| Time | Lecture Chapters |
| [00:00:00] | 1. Resonance Frequency (cont.) |
| [00:40:20] | 2. Equivalent Circuits: Equivalent Dynamic Mass |
| [00:52:38] | 3. Equivalent Dynamic Stiffness |
| [00:53:50] | 4. Equivalent Dynamic Damping |
| [00:57:05] | 5. Lumped Mechanical Equivalent Circuits |
| [01:06:40] | 6. Electromechanical Analogies |
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