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EE C247B/ME C218: Introduction to MEMS Design

EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen. Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.

Lecture 18 - Capacitive Transducers (cont.)

Time	Lecture Chapters
[00:00:00]	1. Linearizing the Voltage-to-Force Transfer Function (cont.)
[00:11:40]	2. Nonlinearity: Electrical Stiffness
[00:56:10]	3. Electrostatic Comb Drive

Go to the Course Home or watch other lectures:

Lecture 01 - Admin & Course Overview

Lecture 02 - Benefits of Scaling I: GHz Micromechanical Resonators

Lecture 03 - Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits

Lecture 04 - Benefits of Scaling III: Thermal Circuits (cont.)

Lecture 05 - Benefits of Scaling III (cont.), Fabrication Process Modules

Lecture 06 - Fabrication Process Modules, Surface Micromachining

Lecture 07 - Surface Micromachining (cont.)

Lecture 08 - Surface Micromachining (cont.), Bulk Micromachining

Lecture 09 - Bulk Micromachining (cont.), Mechanics of Materials for MEMS I

Lecture 10 - Mechanics of Materials for MEMS II, Beam Bending

Lecture 11 - Beam Bending (cont.)

Lecture 12 - Beam Combos (cont.)

Lecture 13 - Beam Combos (cont.), Energy Methods

Lecture 14 - Resonance Frequency

Lecture 15 - Resonance Frequency (cont.), Equivalent Circuits

Lecture 16 - Equivalent Circuits (cont.), Capacitive Transducers

Lecture 17 - Capacitive Transducers (cont.)

Lecture 18 - Capacitive Transducers (cont.)

Lecture 19 - Equivalent Circuits II

Lecture 22 - Sensing Non-Idealities and Integration

Lecture 24 - Equivalent Input-Referred Noise & MDS (Minimum Detectable Signal)

Lecture 25 - Gyro Noise and MDS (Minimum Detectable Signal)