EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley): Lecture 14

EE C247B/ME C218: Introduction to MEMS Design

EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen. Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.

Lecture 14 - Resonance Frequency

Go to the Course Home or watch other lectures:

Lecture 01 - Admin & Course Overview

Lecture 02 - Benefits of Scaling I: GHz Micromechanical Resonators

Lecture 03 - Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits

Lecture 04 - Benefits of Scaling III: Thermal Circuits (cont.)

Lecture 05 - Benefits of Scaling III (cont.), Fabrication Process Modules

Lecture 06 - Fabrication Process Modules, Surface Micromachining

Lecture 07 - Surface Micromachining (cont.)

Lecture 08 - Surface Micromachining (cont.), Bulk Micromachining

Lecture 09 - Bulk Micromachining (cont.), Mechanics of Materials for MEMS I

Lecture 10 - Mechanics of Materials for MEMS II, Beam Bending