EE C247B/ME C218: Introduction to MEMS Design
EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen. Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.
| Lecture 09 - Bulk Micromachining (cont.), Mechanics of Materials for MEMS I |
| Time | Lecture Chapters |
| [00:00:00] | 1. Bulk Micromachining: Wafer Bonding |
| [00:26:30] | 2. Mechanics of Materials for MEMS: Stress, Strain |
| [01:16:15] | 3. Linear Thermal Expansion |
| [01:38:51] | 4. MEMS Material Properties |
| [01:45:28] | 5. Quality Factor (Q) |
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