InfoCoBuild

Fundamentals of Micro and Nanofabrication

Fundamentals of Micro and Nanofabrication. Instructors: Prof. Sushobhan Avasti and Prof. Shankar Selvaraja, Centre for Nano Science and Engineering, IISc Bangalore. The course provides an in-depth understanding of top-down device fabrication. Focus is the unit processes typically used in micro and nanofabrication of devices. Both concepts and practical aspects are covered. Topics include crystal growth, doping, chemical vapor deposition, physical vapor deposition, photolithography, wet etching, dry etching, and packaging. The course is accessible to students from diverse backgrounds, such as materials, physics, chemistry, mechanical engineering, and electrical engineering. (from nptel.ac.in)

Lecture 30 - Optical Lithography Basics: Resist Process 2

Go to the Course Home or watch other lectures:

Substrate and Cleaning

Lecture 01 - Introduction

Lecture 02 - Substrate

Lecture 03 - Substrate (cont.)

Lecture 04 - Introduction to Clean Room

Additive Processing: Defects and Diffusion

Lecture 05 - Contamination and Surface Cleaning

Lecture 06 - Advanced Cleaning Techniques

Lecture 07 - Defects

Lecture 08 - Diffusion

Lecture 09 - Diffusion (Advanced Concepts)

Lecture 10 - Ion Implantation

Additive Processing: Native Films

Lecture 11 - Ion Implantation (cont.)

Lecture 12 - Native Films

Lecture 13 - Native Films (Advanced Concepts)

Lecture 14 - Native Films: Defects at Si/SiO2 Interface

Additive Processing: Chemical Vapor Deposition

Lecture 15 - Methods and Some Definitions

Lecture 16 - Chemical Vapor Deposition: Basics

Lecture 17 - Chemical Vapor Deposition: Precursor Transport

Lecture 18 - Chemical Vapor Deposition: Types of CVD Equipment

Lecture 19 - Chemical Vapor Deposition: Nucleation and Growth

Lecture 20 - Chemical Vapor Deposition: Other Details

Material Deposition: ALD and Physical Vapor Deposition

Lecture 21 - Atomic Layer Deposition

Lecture 22 - Atomic Layer Deposition (cont.)

Lecture 23 - Physical Vapor Deposition: Basics

Lecture 24 - Physical Vapor Deposition: Evaporation

Lecture 25 - Physical Vapor Deposition: Sputtering

Metallization and Optical Lithography

Lecture 26 - Metallization: Contact Resistance

Lecture 27 - Metallization: Electromigration and Epilogue

Lecture 28 - Pattern Transfer Basics

Lecture 29 - Optical Lithography Basics: Resist Process 1

Lecture 30 - Optical Lithography Basics: Resist Process 2

Optical Lithography

Lecture 31 - Optical Lithography: Contact and Proximity Printing

Lecture 32 - Optical Lithography: Stepper and Scanner

Lecture 33 - Projection Lithography: Image Formation Basics

Lecture 34 - Projection Lithography: Image Formation in Photoresist

Lecture 35 - Optical Lithography: Surface Reflection