Fundamentals of Micro and Nanofabrication
Fundamentals of Micro and Nanofabrication. Instructors: Prof. Sushobhan Avasti and Prof. Shankar Selvaraja, Centre for Nano Science and Engineering, IISc Bangalore. The course provides an in-depth understanding of top-down device fabrication. Focus is the unit processes typically used in micro and nanofabrication of devices. Both concepts and practical aspects are covered. Topics include crystal growth, doping, chemical vapor deposition, physical vapor deposition, photolithography, wet etching, dry etching, and packaging. The course is accessible to students from diverse backgrounds, such as materials, physics, chemistry, mechanical engineering, and electrical engineering. (from nptel.ac.in)
| Lecture 10 - Ion Implantation |
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