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VLSI Technology

VLSI Technology. Instructor: Dr. Nandita Dasgupta, Department of Electrical Engineering, IIT Madras. VLSI (Very Large Scale Integration or Very Large Scale Integrated Circuits) is the process of creating an integrated circuit (IC) by combining hundreds of thousands of transistors or devices into a single chip. This course covers lessons in bipolar junction transistor fabrication, crystal structure, crystal growth, epitaxy, oxidation, diffusion, lithography, etching, metallization, bipolar junction transistor, MOSFET, CMOS and BiCMOS technology. (from nptel.ac.in)

Lecture 24 - Lithography: Electron Beam Lithography, X-ray Lithography

Go to the Course Home or watch other lectures:

Lecture 01 - Introduction

Lecture 02 - Bipolar Junction Transistor (BJT) Fabrication

Lecture 03 - MOSFET Fabrication for IC

Lecture 04 - Crystal Structure of Silicon

Lecture 05 - Crystal Structure of Silicon (cont.)

Lecture 06 - Defects in Crystal, Crystal Growth

Lecture 07 - Crystal Growth (cont.), Epitaxy: Vapour Phase Epitaxy

Lecture 08 - Epitaxy: Vapour Phase Epitaxy, Doping during Epitaxy

Lecture 09 - Epitaxy: Doping during Epitaxy (cont.)

Lecture 10 - Epitaxy: Molecular Beam Epitaxy, Oxication

Lecture 11 - Oxidation I – Kinetics of Oxidation

Lecture 12 - Oxidation II - Oxidation Rate Constants

Lecture 13 - Oxidation III – Dopant Redistribution

Lecture 14 - Oxidation IV – Oxide Charges and Oxidation Systems

Lecture 15 - Diffusion I – Theory of Diffusion and Fick's Laws

Lecture 16 - Diffusion II- Infinite Source and Constant Impurity Diffusion

Lecture 17 - Diffusion III - Actual Doping Profile

Lecture 18 - Diffusion IV - Diffusion Systems

Lecture 19 - Ion Implantation Process and Stopping Mechanisms

Lecture 20 - Ion Implantation Systems and Damages during Implantation

Lecture 21 - Annealing of Damages created by Ion Implantations

Lecture 22 - Masking during Implantation, Characterization of Doped Layers

Lecture 23 - Lithography: Optical Lithography

Lecture 24 - Lithography: Electron Beam Lithography, X-ray Lithography

Lecture 25 - Wet Chemical Etching

Lecture 26 - Dry Etching

Lecture 27 - Plasma Etching Systems

Lecture 28 - Etching of Si, SiO2, SiN and Other Materials

Lecture 29 - Plasma Deposition Process

Lecture 30 - Metallization

Lecture 31 - Problems in Aluminium Metal Contacts

Lecture 32 - IC BJT - From Junction Isolation to LOCOS (LOCal Oxidation of Silicon)

Lecture 33 - Problems in LOCOS + Trench Isolation and Selective Epitaxy

Lecture 34 - More about BJT Fabrication and Realization of PNP Transistor

Lecture 35 - I2L Circuits + Transistors in ECL Circuits

Lecture 36 - MOSFET I - Metal Gate vs Self-aligned Poly Gate

Lecture 37 - MOSFET II - Tailoring of Device Parameters

Lecture 38 - CMOS Technology

Lecture 39 - Latch up in CMOS

Lecture 40 - BiCMOS technology