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MEMS and Microsystems

MEMS and Microsystems. Instructor: Prof. Santiram Kal, Department of Electronics and Electrical Communication Engineering, IIT Kharagpur. This course covers lessons in micro sensors, MEMS materials and its properties, micro electronic and micromachining technology for MEMS, etch stop techniques, microstereolithography, MEMS accelerometers and inertial sensors, interface electronics for MEMS and BIO-MEMS. (from nptel.ac.in)

Lecture 02 - Introduction to Microsensors

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Lecture 01 - Introduction to MEMS and Microsystems

Lecture 02 - Introduction to Microsensors

Lecture 03 - Evaluation of MEMS, Microsensors, Market Survey

Lecture 04 - Applications of MEMS

Lecture 05 - MEMS Materials

Lecture 06 - Properties of MEMS Materials

Lecture 07 - Properties of MEMS Materials (cont.), Microelectronic Technology for MEMS

Lecture 08 - Microelectronic Technology for MEMS: Thin Film Deposition: Evaporation, Oxidation, CVD

Lecture 09 - Microelectronic Technology for MEMS: Lithography, Diffusion, Ion Implantation

Lecture 10 - Micromachining Technology for MEMS

Lecture 11 - Micromachining Process

Lecture 12 - Etch Stop Techniques and Microstructure Fabrication

Lecture 13 - Surface and Quartz Micromachining

Lecture 14 - Fabrication of Micromachined Microstructure Devices

Lecture 15 - Microstereolithography

Lecture 16 - MEMS Microsensors Thermal

Lecture 17 - Micromachined Microsensors Mechanical

Lecture 18 - MEMS Pressure and Flow Sensors

Lecture 19 - Micromachined Flow Sensors

Lecture 20 - MEMS Inertial Sensors

Lecture 21 - Micromachined Micro Accelerometers for MEMS

Lecture 22 - MEMS Accelerometers for Avionics

Lecture 23 - Temperature Drift and Damping Analysis

Lecture 24 - Piezoresistive Accelerometer Technology

Lecture 25 - MEMS Capacitive Accelerometer

Lecture 26 - MEMS Capacitive Accelerometer Process

Lecture 27 - MEMS Gyro Sensors

Lecture 28 - MEMS for Space Applications

Lecture 29 - Polymer MEMS and Carbon Nanotubes

Lecture 30 - Wafer Bonding and Packaging of MEMS

Lecture 31 - Interface Electronics for MEMS

Lecture 32 - MEMS for Biomedical Applications